Inventor · disambiguated record
Katsuaki Nogami
Also filed as: NOGAMI KATSUAKI
2 granted patents·1 pending application·6 citations·filing 2011–2017
49Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0186US10163663B2Substrate processing apparatus, exhaust system and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2017·Granted Dec 25, 2018·5 cites·9 claims
- 0254US8734148B2Heat treatment apparatus and method of manufacturing semiconductor deviceYAMAZAKI KEISHIN·Filed 2011·Granted May 27, 2014·1 cites·6 claims
- 0329US2016076149A1Substrate processing apparatus, method of manufacturing semiconductor device and furnace lidHITACHI INT ELECTRIC INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →