Inventor · disambiguated record
Kevin Eduard Heidrich
Also filed as: HEIDRICH KEVIN · HEIDRICH KEVIN E · HEIDRICH Kevin Eduard
5 granted patents·2 pending applications·23 citations·filing 2002–2023
74Inventor score
Top patents by PatentIndex Score
7 records- 0182US7808643B2Determining overlay error using an in-chip overlay targetNANOMETRICS INC·Filed 2008·Granted Oct 5, 2010·9 cites·39 claims
- 0281US12386271B2Multi-layer calibration for empirical overlay measurementONTO INNOVATION INC·Filed 2022·Granted Aug 12, 2025·1 cites·20 claims
- 0379US10488184B2Interferometric characterization of surface topographyNANOMETRICS INC·Filed 2016·Granted Nov 26, 2019·3 cites·6 claims
- 0460US6939202B2Substrate retainer wear detection method and apparatusINTEL CORP·Filed 2003·Granted Sep 6, 2005·10 cites·34 claims
- 0557US2024248045A1Mask and procedure for process performance detectionONTO INNOVATION INC·Filed 2023·Application pending·0 cites
- 0654US12013350B2Effective cell approximation model for logic structuresONTO INNOVATION INC·Filed 2021·Granted Jun 18, 2024·0 cites·20 claims
- 0732US2004075119A1Forming polysilicon structuresFiled 2002·Application pending·0 cites
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