Inventor · disambiguated record
Sanjay Thekdi
Also filed as: THEKDI SANJAY · THEKDI SANJAY M
10 granted patents·2 pending applications·349 citations·filing 1999–2004
90Inventor score
Top patents by PatentIndex Score
12 records- 0197US6322716B1Method for conditioning a plasma etch chamberCYPRESS SEMICONDUCTOR CORP·Filed 1999·Granted Nov 27, 2001·222 cites·20 claims
- 0286US6696365B2Process for in-situ etching a hardmask stackAPPLIED MATERIALS INC·Filed 2002·Granted Feb 24, 2004·38 cites·5 claims
- 0383US6979652B2Etching multi-shaped openings in siliconAPPLIED MATERIALS INC·Filed 2002·Granted Dec 27, 2005·30 cites·28 claims
- 0462US6697553B2Compact, low insertion loss, high yield arrayed waveguide gratingJDS UNIPHASE CORP·Filed 2002·Granted Feb 24, 2004·9 cites·78 claims
- 0561US6372634B1Plasma etch chemistry and method of improving etch controlCYPRESS SEMICONDUCTOR CORP·Filed 1999·Granted Apr 16, 2002·26 cites·29 claims
- 0659US7162108B2Planar lightwave circuit variable optical attenuatorJDS UNIPHASE CORP·Filed 2004·Granted Jan 9, 2007·8 cites·18 claims
- 0757US7261982B2Planar circuit optimizationJDS UNIPHASE CORP·Filed 2003·Granted Aug 28, 2007·5 cites·24 claims
- 0852US6905616B2Method of releasing devices from a substrateAPPLIED MATERIALS INC·Filed 2003·Granted Jun 14, 2005·4 cites·9 claims
- 0950US6979640B1Contact structure and method of making the sameCYPRESS SEMICONDUCTOR CORP·Filed 2002·Granted Dec 27, 2005·4 cites·17 claims
- 1048US6947653B2Waveguide stress engineering and compatible passivation in planar lightwave circuitsJDS UNIPHASE CORP·Filed 2001·Granted Sep 20, 2005·3 cites·29 claims
- 1137US2003052082A1Method of forming optical waveguides in a semiconductor substrateFiled 2001·Application pending·0 cites
- 1235US2003052088A1Method for increasing capacitance in stacked and trench capacitorsFiled 2001·Application pending·0 cites
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