Inventor · disambiguated record
Sung Bum Seo
Also filed as: SEO SUNG BUM
2 granted patents·10 citations·filing 2005–2007
55Inventor score
Technology areasB24B
Top patents by PatentIndex Score
2 records- 0166US7674156B2Cleaning device for chemical mechanical polishing equipmentK C TECH CO LTD·Filed 2007·Granted Mar 9, 2010·4 cites·15 claims
- 0263US7537512B2Multiple fluid supplying apparatus for carrier of semiconductor wafer polishing systemDOOSAN MECATEC CO LTD·Filed 2005·Granted May 26, 2009·6 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →