Inventor · disambiguated record
Kaoru Oohashi
Also filed as: OOHASHI KAORU
19 granted patents·3 pending applications·849 citations·filing 1984–2020
95Inventor score
Top patents by PatentIndex Score
22 records- 0198USD553104SAbsorption board for an electric chuck used in semiconductor manufactureTOKYO ELECTRON LTD·Filed 2004·Granted Oct 16, 2007·598 cites·1 claims
- 0294US8387562B2Plasma processor and plasma processing methodKIKUCHI AKIHIRO·Filed 2011·Granted Mar 5, 2013·22 cites·12 claims
- 0393US9437402B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 6, 2016·11 cites·9 claims
- 0493US8056503B2Plasma procesor and plasma processing methodKIKUCHI AKIHIRO·Filed 2002·Granted Nov 15, 2011·47 cites·31 claims
- 0593US7718007B2Substrate supporting member and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted May 18, 2010·23 cites·12 claims
- 0692US8904957B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Dec 9, 2014·12 cites·2 claims
- 0791US7815740B2Substrate mounting table, substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Oct 19, 2010·19 cites·16 claims
- 0889US10026631B2Plasma processing apparatus and heater temperature control methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 17, 2018·4 cites·5 claims
- 0985US9728381B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Aug 8, 2017·4 cites·3 claims
- 1083US10629464B2Plasma processing apparatus and heater temperature control methodTOKYO ELECTRON LTD·Filed 2018·Granted Apr 21, 2020·2 cites·4 claims
- 1182US8491752B2Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanismUEDA TAKEHIRO·Filed 2007·Granted Jul 23, 2013·7 cites·17 claims
- 1278US9412635B2Electrostatic chuck deviceTOKYO ELECTRON LTD·Filed 2013·Granted Aug 9, 2016·4 cites·5 claims
- 1377US8573836B2Apparatus and method for evaluating a substrate mounting deviceSASAKI YASUHARU·Filed 2007·Granted Nov 5, 2013·6 cites·8 claims
- 1476US4593920AVehicle height control systemNIPPON DENSO CO·Filed 1984·Granted Jun 10, 1986·38 cites·5 claims
- 1567US2020219740A1Plasma processing apparatus and heater temperature control methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1666US4618156AVehicle height control systemNIPPON DENSO CO·Filed 1984·Granted Oct 21, 1986·26 cites·11 claims
- 1756US2008145556A1Method for manufacturing substrate mounting tableTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1855US2015132863A1Plasma processing apparatus and heater temperature control methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1953US8869376B2Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanismTOKYO ELECTRON LTD·Filed 2013·Granted Oct 28, 2014·0 cites·8 claims
- 2052US4611815AVehicle height control systemNIPPON DENSO CO·Filed 1984·Granted Sep 16, 1986·18 cites·5 claims
- 2144US11569073B2Assembly provided with coolant flow channel, method of controlling assembly provided with coolant flow channel, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 31, 2023·0 cites·10 claims
- 2236US4591185AVehicle height control systemNIPPON DENSO CO·Filed 1984·Granted May 27, 1986·8 cites·6 claims
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