Inventor · disambiguated record
Suchitra Subrahmanyan
Also filed as: SUBRAHMANYAN SUCHITRA
5 granted patents·1 pending application·348 citations·filing 1996–2004
85Inventor score
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
6 records- 0196US6107192AReactive preclean prior to metallization for sub-quarter micron applicationAPPLIED MATERIALS INC·Filed 1997·Granted Aug 22, 2000·212 cites·20 claims
- 0291US6905965B2Reactive preclean prior to metallization for sub-quarter micron applicationAPPLIED MATERIALS INC·Filed 2004·Granted Jun 14, 2005·47 cites·20 claims
- 0388US6693030B1Reactive preclean prior to metallization for sub-quarter micron applicationAPPLIED MATERIALS INC·Filed 2000·Granted Feb 17, 2004·34 cites·59 claims
- 0476US6110828AIn-situ capped aluminum plug (CAP) process using selective CVD AL for integrated plug/interconnect metallizationAPPLIED MATERIALS INC·Filed 1996·Granted Aug 29, 2000·50 cites·22 claims
- 0537US6518176B2Method of selective formation of a barrier layer for a contact level viaFiled 1998·Granted Feb 11, 2003·5 cites·23 claims
- 0636US2002186381A1Method and apparatus for detecting the thickness of copper oxideFiled 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →