Inventor · disambiguated record
Josephus Cornelius Johannes Antonius Vugts
Also filed as: VUGTS JOSEPHUS CORNELIUS JOHAN · VUGTS JOSEPHUS CORNELIUS JOHANNES ANTONIUS
6 granted patents·1 pending application·32 citations·filing 2004–2010
78Inventor score
Files withASML NETHERLANDS BV5DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS1VAN DEN HEUVEL MARTINUS WILHELMUS1
Top patents by PatentIndex Score
7 records- 0178US7878755B2Load lock and method for transferring objectsASML NETHERLANDS BV·Filed 2008·Granted Feb 1, 2011·8 cites·11 claims
- 0264US7359031B2Lithographic projection assembly, load lock and method for transferring objectsASML NETHERLANDS BV·Filed 2004·Granted Apr 15, 2008·12 cites·25 claims
- 0349US9289802B2Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatusDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2008·Granted Mar 22, 2016·0 cites·36 claims
- 0448US7394520B2Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lockASML NETHERLANDS BV·Filed 2004·Granted Jul 1, 2008·10 cites·25 claims
- 0547US7576831B2Method and apparatus for maintaining a machine partASML NETHERLANDS BV·Filed 2004·Granted Aug 18, 2009·2 cites·19 claims
- 0644US8976332B2Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit systemVAN DEN HEUVEL MARTINUS WILHELMUS·Filed 2010·Granted Mar 10, 2015·0 cites·20 claims
- 0733US2010271606A1Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →