Inventor · disambiguated record
Rekha Ranganathan
Also filed as: RANGANATHAN REKHA
4 granted patents·226 citations·filing 1997–2000
82Inventor score
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
4 records- 0192US6042654AMethod of cleaning CVD cold-wall chamber and exhaust linesAPPLIED MATERIALS INC·Filed 1998·Granted Mar 28, 2000·134 cites·39 claims
- 0285US6254686B1Vented lower liner for heating exhaust gas from a single substrate reactorAPPLIED MATERIALS INC·Filed 2000·Granted Jul 3, 2001·28 cites·9 claims
- 0383US6153260AMethod for heating exhaust gas in a substrate reactorAPPLIED MATERIALS INC·Filed 1997·Granted Nov 28, 2000·45 cites·6 claims
- 0457US6368567B2Point-of-use exhaust by-product reactorAPPLIED MATERIALS INC·Filed 1998·Granted Apr 9, 2002·19 cites·18 claims
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