Inventor · disambiguated record

Toshiyuki Nozaki

Also filed as: NOZAKI TOSHIYUKI

2 granted patents·62 citations·filing 1985–2003

61Inventor score

Technology areasH01J

Files withANELVA CORP1 MES AFTY CORP1

Top patents by PatentIndex Score

2 records

0186US4604180ATarget assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering deviceANELVA CORP·Filed 1985·Granted Aug 5, 1986·59 cites·18 claims
0247US7485204B2ECR plasma source and ECR plasma deviceMES AFTY CORP·Filed 2003·Granted Feb 3, 2009·3 cites·7 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →