Inventor · disambiguated record
Yohichi Hirukawa
Also filed as: HIRUKAWA YOHICHI
2 granted patents·80 citations·filing 1985–1987
66Inventor score
Files withANELVA CORP2
Top patents by PatentIndex Score
2 records- 0186US4604180ATarget assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering deviceANELVA CORP·Filed 1985·Granted Aug 5, 1986·59 cites·18 claims
- 0253US4704199AMethod of forming an iron oxide film by reacting sputtering with control of a glow discharge by monitoring an emission spectrum of iron from the glow dischargeANELVA CORP·Filed 1987·Granted Nov 3, 1987·21 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →