Inventor · disambiguated record
Eric Hill
Also filed as: HILL ERIC · HILL ERIC R
21 granted patents·2 pending applications·3,159 citations·filing 2008–2023
96Inventor score
Top patents by PatentIndex Score
23 records- 0198US10053774B2Reactor system for sublimation of pre-clean byproducts and method thereofASM IP HOLDING BV·Filed 2015·Granted Aug 21, 2018·444 cites·8 claims
- 0298US9514927B2Plasma pre-clean module and processASM IP HOLDING BV·Filed 2016·Granted Dec 6, 2016·467 cites·22 claims
- 0398US9299557B2Plasma pre-clean module and processASM IP HOLDING BV·Filed 2014·Granted Mar 29, 2016·472 cites·39 claims
- 0497US9890456B2Method and system for in situ formation of gas-phase compoundsASM IP HOLDING BV·Filed 2014·Granted Feb 13, 2018·466 cites·14 claims
- 0596USD793352SGetter plateASM IP HOLDING BV·Filed 2016·Granted Aug 1, 2017·474 cites·1 claims
- 0694US10770336B2Substrate lift mechanism and reactor including sameASM IP HOLDING BV·Filed 2017·Granted Sep 8, 2020·286 cites·16 claims
- 0792US9169975B2Systems and methods for mass flow controller verificationSARIN MICHAEL CHRISTOPHER·Filed 2012·Granted Oct 27, 2015·506 cites·34 claims
- 0891US11018047B2Hybrid lift pinASM IP HOLDING BV·Filed 2018·Granted May 25, 2021·9 cites·20 claims
- 0987US8440048B2Load lock having secondary isolation chamberAGGARWAL RAVINDER·Filed 2010·Granted May 14, 2013·10 cites·20 claims
- 1086US8047706B2Calibration of temperature control system for semiconductor processing chamberASM INC·Filed 2008·Granted Nov 1, 2011·18 cites·28 claims
- 1183US10787741B2Method and system for in situ formation of gas-phase compoundsASM IP HOLDING BV·Filed 2018·Granted Sep 29, 2020·1 cites·10 claims
- 1282US10373850B2Pre-clean chamber and process with substrate tray for changing substrate temperatureASM IP HOLDING BV·Filed 2015·Granted Aug 6, 2019·3 cites·23 claims
- 1381US10519541B2Reactor system for sublimation of pre-clean byproducts and method thereofASM IP HOLDING BV·Filed 2018·Granted Dec 31, 2019·2 cites·13 claims
- 1480US11053585B2Reactor system for sublimation of pre-clean byproducts and method thereofASM IP HOLDING BV·Filed 2019·Granted Jul 6, 2021·0 cites·19 claims
- 1575US12043899B2Reactor system and method to reduce residue buildup during a film deposition processASM IP HOLDING BV·Filed 2022·Granted Jul 23, 2024·0 cites·18 claims
- 1675US12040217B2Substrate lift mechanism and reactor including sameASM IP HOLDING BV·Filed 2023·Granted Jul 16, 2024·0 cites·20 claims
- 1765US11587821B2Substrate lift mechanism and reactor including sameASM IP HOLDING BV·Filed 2020·Granted Feb 21, 2023·0 cites·8 claims
- 1863US11390950B2Reactor system and method to reduce residue buildup during a film deposition processASM IP HOLDING BV·Filed 2017·Granted Jul 19, 2022·0 cites·20 claims
- 1962US11015245B2Gas-phase reactor and system having exhaust plenum and components thereofASM IP HOLDING BV·Filed 2014·Granted May 25, 2021·1 cites·12 claims
- 2057US11264255B2Pre-clean chamber and process with substrate tray for changing substrate temperatureASM IP HOLDING BV·Filed 2019·Granted Mar 1, 2022·0 cites·20 claims
- 2155US2015267295A1Removable substrate tray and assembly and reactor including sameASM IP HOLDING BV·Filed 2014·Application pending·0 cites
- 2251US8927435B2Load lock having secondary isolation chamberASM INC·Filed 2013·Granted Jan 6, 2015·0 cites·23 claims
- 2347US2010162940A1Blue Dot Moisture DetectorHILL STEPHEN A·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →