Inventor · disambiguated record
Cheonsoo Han
Also filed as: HAN CHEONSOO
4 granted patents·2 pending applications·0 citations·filing 2013–2017
52Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0147US2018127880A1Microwave plasma source and microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 0245US9406557B2Copper wiring forming method with Ru liner and Cu alloy fillTOKYO ELECTRON LTD·Filed 2014·Granted Aug 2, 2016·0 cites·8 claims
- 0344US10190217B2Plasma film-forming method and plasma film-forming apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jan 29, 2019·0 cites·10 claims
- 0442US9253862B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Feb 2, 2016·0 cites·10 claims
- 0540US2014060572A1Plasma processing apparatus and cleaning method for removing metal oxide filmTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0636US10522467B2Ruthenium wiring and manufacturing method thereofTOKYO ELECTRON LTD·Filed 2017·Granted Dec 31, 2019·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →