Inventor · disambiguated record
Hsueh-Shih Fu
Also filed as: FU HSUEH-SHIH
3 granted patents·1 pending application·52 citations·filing 2005–2007
68Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0191US7359759B2Method and system for virtual metrology in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Apr 15, 2008·46 cites·7 claims
- 0275US8041440B2Method and system for providing a selection of golden tools for better defect density and product yieldTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Oct 18, 2011·4 cites·20 claims
- 0360US7184851B2Method of providing cassettes containing control wafers to designated processing tools and metrology toolsTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Feb 27, 2007·2 cites·3 claims
- 0451US2007225848A1Method and System for Providing Automatic and Accurate Manufacturing Delivery ScheduleTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →