Inventor · disambiguated record
David Benjaminson
Also filed as: BENJAMINSON DAVID · BENJAMINSON DAVID MICHAEL
15 granted patents·2 pending applications·327 citations·filing 2015–2023
92Inventor score
Files withAPPLIED MATERIALS INC17
Top patents by PatentIndex Score
17 records- 0198US9741593B2Thermal management systems and methods for wafer processing systemsAPPLIED MATERIALS INC·Filed 2015·Granted Aug 22, 2017·115 cites·17 claims
- 0295US10147620B2Bolted wafer chuck thermal management systems and methods for wafer processing systemsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 4, 2018·68 cites·18 claims
- 0395US9691645B2Bolted wafer chuck thermal management systems and methods for wafer processing systemsAPPLIED MATERIALS INC·Filed 2015·Granted Jun 27, 2017·118 cites·21 claims
- 0494US10468276B2Thermal management systems and methods for wafer processing systemsAPPLIED MATERIALS INC·Filed 2017·Granted Nov 5, 2019·9 cites·20 claims
- 0589US11049755B2Semiconductor substrate supports with embedded RF shieldAPPLIED MATERIALS INC·Filed 2018·Granted Jun 29, 2021·8 cites·17 claims
- 0686US9540736B2Methods of etching films with reduced surface roughnessAPPLIED MATERIALS INC·Filed 2015·Granted Jan 10, 2017·2 cites·19 claims
- 0785US11158527B2Thermal management systems and methods for wafer processing systemsAPPLIED MATERIALS INC·Filed 2019·Granted Oct 26, 2021·2 cites·20 claims
- 0883US9896770B2Methods of etching films with reduced surface roughnessAPPLIED MATERIALS INC·Filed 2016·Granted Feb 20, 2018·2 cites·16 claims
- 0981US10607867B2Bolted wafer chuck thermal management systems and methods for wafer processing systemsAPPLIED MATERIALS INC·Filed 2018·Granted Mar 31, 2020·2 cites·20 claims
- 1072US11062887B2High temperature RF heater pedestalsAPPLIED MATERIALS INC·Filed 2018·Granted Jul 13, 2021·1 cites·20 claims
- 1167US11217462B2Bolted wafer chuck thermal management systems and methods for wafer processing systemsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 4, 2022·0 cites·19 claims
- 1263US10233547B2Methods of etching films with reduced surface roughnessAPPLIED MATERIALS INC·Filed 2018·Granted Mar 19, 2019·0 cites·19 claims
- 1359US2025125181A1Low temperature electrostatic chuckAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1457US12002659B2Apparatus for generating etchants for remote plasma processesAPPLIED MATERIALS INC·Filed 2022·Granted Jun 4, 2024·0 cites·20 claims
- 1545US11776822B2Wet cleaning of electrostatic chuckAPPLIED MATERIALS INC·Filed 2019·Granted Oct 3, 2023·0 cites·14 claims
- 1644US12488967B2Extreme uniformity heated substrate support assemblyAPPLIED MATERIALS INC·Filed 2019·Granted Dec 2, 2025·0 cites·12 claims
- 1734US2018213608A1Electrostatic chuck with radio frequency isolated heatersAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →