Inventor · disambiguated record
Masaki Tozawa
Also filed as: TOZAWA MASAKI
5 granted patents·232 citations·filing 1997–2004
85Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0194US7113838B2Method and apparatus for monitoring tool performanceTOKYO ELECTRON LTD·Filed 2004·Granted Sep 26, 2006·111 cites·35 claims
- 0286US6355902B2Plasma film forming method and plasma film forming apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Mar 12, 2002·23 cites·6 claims
- 0385US6215087B1Plasma film forming method and plasma film forming apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Apr 10, 2001·57 cites·7 claims
- 0472US7636608B2Method for dynamic sensor configuration and runtime executionTOKYO ELECTRON LTD·Filed 2004·Granted Dec 22, 2009·17 cites·24 claims
- 0559US6443165B1Method for cleaning plasma treatment device and plasma treatment systemTOKYO ELECTRON LTD·Filed 1997·Granted Sep 3, 2002·24 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →