Inventor · disambiguated record
Chung-Hsuan Liu
Also filed as: Liu Chung-Hsuan
5 granted patents·1 pending application·3 citations·filing 2016–2025
67Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD6
Top patents by PatentIndex Score
6 records- 0192US12032302B2Method and device for cleaning substratesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 9, 2024·2 cites·20 claims
- 0282US2025328088A1Method and device for cleaning substratesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0381US12393129B2Method and device for cleaning substratesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 19, 2025·0 cites·20 claims
- 0472US10520805B2System and method for localized EUV pellicle glue removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 31, 2019·1 cites·20 claims
- 0563US11079669B2System and method for localized EUV pellicle glue removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 3, 2021·0 cites·20 claims
- 0652US11430671B2Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectorsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 30, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →