Inventor · disambiguated record
Gary Yama
Also filed as: YAMA GARY
64 granted patents·9 pending applications·220 citations·filing 2004–2024
98Inventor score
Top patents by PatentIndex Score
73 records- 0197US7449355B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2005·Granted Nov 11, 2008·57 cites·36 claims
- 0292US9003885B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2013·Granted Apr 14, 2015·9 cites·23 claims
- 0388US8906730B2Method of forming membranes with modified stress characteristicsGRAHAM ANDREW B·Filed 2011·Granted Dec 9, 2014·8 cites·20 claims
- 0488US7956428B2Microelectromechanical devices and fabrication methodsBOSCH GMBH ROBERT·Filed 2005·Granted Jun 7, 2011·15 cites·11 claims
- 0588US7757555B2Tri-axis accelerometer having a single proof mass and fully differential output signalsBOSCH GMBH ROBERT·Filed 2006·Granted Jul 20, 2010·14 cites·10 claims
- 0684US9863901B2Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structureBOSCH GMBH ROBERT·Filed 2014·Granted Jan 9, 2018·4 cites·13 claims
- 0784US7671515B2Microelectromechanical devices and fabrication methodsBOSCH GMBH ROBERT·Filed 2006·Granted Mar 2, 2010·13 cites·6 claims
- 0882US8418559B2Tri-axis accelerometer having a single proof mass and fully differential output signalsPAN ZHIYU·Filed 2010·Granted Apr 16, 2013·4 cites·14 claims
- 0982US7401517B2Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangementBOSCH GMBH ROBERT·Filed 2006·Granted Jul 22, 2008·15 cites·17 claims
- 1082US7319372B2In-plane mechanically coupled microelectromechanical tuning fork resonatorsUNIV LELAND STANFORD JUNIOR·Filed 2005·Granted Jan 15, 2008·15 cites·14 claims
- 1181US8900906B2Atomic layer deposition strengthening members and method of manufactureYAMA GARY·Filed 2012·Granted Dec 2, 2014·3 cites·19 claims
- 1280US11131646B2Electrochemical sequencing of DNA using an edge electrodeBOSCH GMBH ROBERT·Filed 2018·Granted Sep 28, 2021·1 cites·21 claims
- 1380US8673756B2Out-of-plane spacer defined electrodeGRAHAM ANDREW B·Filed 2011·Granted Mar 18, 2014·3 cites·9 claims
- 1479US10440830B2Laser carbonization of polymer coatings in an open-air environmentBOSCH GMBH ROBERT·Filed 2017·Granted Oct 8, 2019·1 cites·20 claims
- 1579US7625773B2Anti-stiction technique for electromechanical systems and electromechanical device employing sameBOSCH GMBH ROBERT·Filed 2008·Granted Dec 1, 2009·7 cites·43 claims
- 1677US7981308B2Method of etching a device using a hard mask and etch stop layerBOSCH GMBH ROBERT·Filed 2007·Granted Jul 19, 2011·4 cites·11 claims
- 1776US11281295B2Apparatus for sensing and three dimensional hapticBOSCH GMBH ROBERT·Filed 2019·Granted Mar 22, 2022·2 cites·20 claims
- 1876US9588073B2Resistive MEMS humidity sensorBOSCH GMBH ROBERT·Filed 2013·Granted Mar 7, 2017·2 cites·12 claims
- 1976US9511998B2MEMS device having a getterBOSCH GMBH ROBERT·Filed 2014·Granted Dec 6, 2016·3 cites·12 claims
- 2076US8232143B2Device formed using a hard mask and etch stop layerYAMA GARY·Filed 2011·Granted Jul 31, 2012·3 cites·11 claims
- 2175US10175188B2Trench based capacitive humidity sensorBOSCH GMBH ROBERT·Filed 2013·Granted Jan 8, 2019·3 cites·7 claims
- 2274US9257587B2Suspension and absorber structure for bolometerBOSCH GMBH ROBERT·Filed 2013·Granted Feb 9, 2016·3 cites·12 claims
- 2374US9130081B2Bolometer having absorber with pillar structure for thermal shortingBOSCH GMBH ROBERT·Filed 2013·Granted Sep 8, 2015·3 cites·18 claims
- 2473US10999421B1System and method for utilizing pressure sensors in an electric deviceBOSCH GMBH ROBERT·Filed 2019·Granted May 4, 2021·2 cites·17 claims
- 2573US9255328B2Metamaterial and method for forming a metamaterial using atomic layer depositionBOSCH GMBH ROBERT·Filed 2014·Granted Feb 9, 2016·3 cites·14 claims
- 2672US9199838B2Thermally shorted bolometerBOSCH GMBH ROBERT·Filed 2014·Granted Dec 1, 2015·2 cites·20 claims
- 2770US9368658B2Serpentine IR sensorBOSCH GMBH ROBERT·Filed 2013·Granted Jun 14, 2016·2 cites·18 claims
- 2868US9064982B2Thin-film encapsulated infrared sensorBOSCH GMBH ROBERT·Filed 2013·Granted Jun 23, 2015·2 cites·16 claims
- 2967US9933312B2Bolometer fluid flow and temperature sensorBOSCH GMBH ROBERT·Filed 2016·Granted Apr 3, 2018·1 cites·20 claims
- 3067US2025271389A1Nucleic acid detection with a nanogap electrical sensorBOSCH GMBH ROBERT·Filed 2024·Application pending·0 cites
- 3167US2025321204A1Sensor unit of a nucleic acid analysis systemBOSCH GMBH ROBERT·Filed 2024·Application pending·0 cites
- 3266US9945727B2Resistive switching for MEMS devicesBOSCH GMBH ROBERT·Filed 2015·Granted Apr 17, 2018·1 cites·14 claims
- 3365US2025320550A1Sequencing by synthesis using electroactively labeled 3-oh-modified nucleotidesBOSCH GMBH ROBERT·Filed 2024·Application pending·0 cites
- 3464US9677950B2Portable device with temperature sensingBOSCH GMBH ROBERT·Filed 2014·Granted Jun 13, 2017·1 cites·20 claims
- 3564US2025154580A1Enzyme translocators in nanogap with 3' -estersBOSCH GMBH ROBERT·Filed 2023·Application pending·0 cites
- 3663US9236522B2MEMS infrared sensor including a plasmonic lensBOSCH GMBH ROBERT·Filed 2013·Granted Jan 12, 2016·0 cites·17 claims
- 3763US7750758B2Multi-ring resonator system and methodBOSCH GMBH ROBERT·Filed 2007·Granted Jul 6, 2010·5 cites·17 claims
- 3863US2024310322A1Diffusion-based electrochemical sensorsBOSCH GMBH ROBERT·Filed 2023·Application pending·0 cites
- 3962US10298858B2Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile deviceBOSCH GMBH ROBERT·Filed 2013·Granted May 21, 2019·1 cites·3 claims
- 4062US8426289B2Wafer with spacer including horizontal memberGRAHAM ANDREW B·Filed 2011·Granted Apr 23, 2013·1 cites·20 claims
- 4162US2025327772A1Nucleic Acid Sequencing Via Enzyme TranslocatorsBOSCH GMBH ROBERT·Filed 2023·Application pending·0 cites
- 4260US10173887B2Epi-poly etch stop for out of plane spacer defined electrodeBOSCH GMBH ROBERT·Filed 2016·Granted Jan 8, 2019·0 cites·3 claims
- 4359US9073749B2Structured gap for a MEMS pressure sensorBOSCH GMBH ROBERT·Filed 2012·Granted Jul 7, 2015·2 cites·9 claims
- 4459US8317882B2Method of manufacturing a planar electrode with large surface areaCHEN PO-JUI·Filed 2009·Granted Nov 27, 2012·0 cites·15 claims
- 4558US9469522B2Epi-poly etch stop for out of plane spacer defined electrodeBOSCH GMBH ROBERT·Filed 2014·Granted Oct 18, 2016·0 cites·7 claims
- 4657US9242850B2Out-of-plane spacer defined electrodeBOSCH GMBH ROBERT·Filed 2014·Granted Jan 26, 2016·0 cites·7 claims
- 4757US7875482B2Substrate with multiple encapsulated pressuresBOSCH GMBH ROBERT·Filed 2009·Granted Jan 25, 2011·1 cites·15 claims
- 4856US8187903B2Method of epitaxially growing piezoresistorsYAMA GARY·Filed 2009·Granted May 29, 2012·4 cites·20 claims
- 4955US8890283B2Wafer with recessed plugBOSCH GMBH ROBERT·Filed 2014·Granted Nov 18, 2014·0 cites·8 claims
- 5052US9557222B2Portable device with temperature sensingBOSCH GMBH ROBERT·Filed 2014·Granted Jan 31, 2017·0 cites·11 claims
Showing the top 50 of 73 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →