Inventor · disambiguated record
Stuart Stanton
Also filed as: STANTON STUART · STANTON STUART T · STANTON STUART THOMAS
11 granted patents·3 pending applications·599 citations·filing 1995–2006
93Inventor score
Top patents by PatentIndex Score
14 records- 0195US5631721AHybrid illumination system for use in photolithographySVG LITHOGRAPHY SYSTEMS INC·Filed 1995·Granted May 20, 1997·181 cites·47 claims
- 0294US5596413ASub-micron through-the-lens positioning utilizing out of phase segmented gratingsLUCENT TECHNOLOGIES INC·Filed 1995·Granted Jan 21, 1997·142 cites·34 claims
- 0392US5684566AIllumination system and method employing a deformable mirror and diffractive optical elementsSVG LITHOGRAPHY SYSTEMS INC·Filed 1995·Granted Nov 4, 1997·127 cites·23 claims
- 0481US6528799B1Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systemsLUCENT TECHNOLOGIES INC·Filed 2000·Granted Mar 4, 2003·18 cites·47 claims
- 0577US5654540AHigh resolution remote position detection using segmented gratingsFiled 1995·Granted Aug 5, 1997·40 cites·29 claims
- 0672US6469793B1Multi-channel grating interference alignment sensorSVG LITHOGRAPHY SYSTEMS INC·Filed 1999·Granted Oct 22, 2002·41 cites·19 claims
- 0769US7305333B2Projection electron beam lithography apparatus and method employing an estimatorAGERE SYSTEMS INC·Filed 2006·Granted Dec 4, 2007·4 cites·18 claims
- 0861US6859324B2Optical demultiplexer/multiplexer architectureAGERE SYSTEMS INC·Filed 2002·Granted Feb 22, 2005·7 cites·14 claims
- 0960US6177218B1Lithographic process for device fabrication using electron beam imagingLUCENT TECHNOLOGIES INC·Filed 1999·Granted Jan 23, 2001·28 cites·11 claims
- 1052US7050957B2Projection electron beam lithography apparatus and method employing an estimatorELITH LLC·Filed 2001·Granted May 23, 2006·5 cites·15 claims
- 1139US5891605AReduction in damage to optical elements used in optical lithography for device fabricationLUCENT TECHNOLOGIES INC·Filed 1996·Granted Apr 6, 1999·6 cites·4 claims
- 1237US2003169972A1Method of inserting optical system into optical fibers in bulk and bulk optical fiber structureFiled 2002·Application pending·0 cites
- 1337US2004022494A1Fiber optic array with fiber tap and methd for making and usingFiled 2002·Application pending·0 cites
- 1437US2004021931A1Article including an optical gain equalizerFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →