Inventor · disambiguated record
Eun-Hee Shin
Also filed as: SHIN EUN-HEE
6 granted patents·1 pending application·429 citations·filing 1998–2001
85Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
7 records- 0196US6179955B1Dry etching apparatus for manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Jan 30, 2001·344 cites·8 claims
- 0277US6251241B1Inductive-coupled plasma apparatus employing shield and method for manufacturing the shieldSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Jun 26, 2001·18 cites·19 claims
- 0373US6146492APlasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning methodSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Nov 14, 2000·41 cites·23 claims
- 0465US6499492B1Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaningSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Dec 31, 2002·10 cites·17 claims
- 0549US6335284B1Metallization process for manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Jan 1, 2002·16 cites·12 claims
- 0640US6585907B2Method for manufacturing a shield for an inductively-couple plasma apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Jul 1, 2003·0 cites·1 claims
- 0733US2002061650A1Metallization process for manufacturing semiconductor devices and system used in sameFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →