Inventor · disambiguated record
Kentaro Hiruma
Also filed as: HIRUMA KENTARO
2 granted patents·1 citations·filing 2015–2015
30Inventor score
Technology areasG03F
Files withCANON KK2
Top patents by PatentIndex Score
2 records- 0161US9966245B2Cooling apparatus, illumination optical system, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted May 8, 2018·1 cites·9 claims
- 0231US9632423B2Illumination device, exposure apparatus, adjusting method, and method for manufacturing objectCANON KK·Filed 2015·Granted Apr 25, 2017·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →