Inventor · disambiguated record
Yutaka Setomoto
Also filed as: SETOMOTO YUTAKA
12 granted patents·13 pending applications·31 citations·filing 2008–2024
87Inventor score
Top patents by PatentIndex Score
25 records- 0184US8999435B2Process of producing grating for X-ray image pickup apparatusSETOMOTO YUTAKA·Filed 2010·Granted Apr 7, 2015·7 cites·17 claims
- 0284US8908274B2Microstructure manufacturing method and microstructureTESHIMA TAKAYUKI·Filed 2011·Granted Dec 9, 2014·7 cites·15 claims
- 0383US9927349B2Method of producing through wiring substrate and method of producing deviceCANON KK·Filed 2016·Granted Mar 27, 2018·4 cites·24 claims
- 0482US8895934B2Microstructure manufacturing methodWANG SHINAN·Filed 2011·Granted Nov 25, 2014·6 cites·16 claims
- 0575US9891327B2Structure, method for manufacturing the same, and image pickup apparatus including the structureTESHIMA TAKAYUKI·Filed 2012·Granted Feb 13, 2018·4 cites·8 claims
- 0675US9040227B2Microstructure manufacturing methodTESHIMA TAKAYUKI·Filed 2012·Granted May 26, 2015·1 cites·11 claims
- 0775US8767914B2Structure, method of manufacturing the same, and imaging apparatusTESHIMA TAKAYUKI·Filed 2012·Granted Jul 1, 2014·1 cites·8 claims
- 0868US10667392B2Method for manufacturing through wiring substrate and method for manufacturing deviceCANON KK·Filed 2016·Granted May 26, 2020·1 cites·6 claims
- 0960US2022364217A1Deposition mask and manufacturing method of organic electronic deviceCANON KK·Filed 2022·Application pending·0 cites
- 1059US2025194425A1Actuator, liquid ejection head, and method for manufacturing actuatorCANON KK·Filed 2024·Application pending·0 cites
- 1156US9953734B2Microstructure manufacturing methodCANON KK·Filed 2016·Granted Apr 24, 2018·0 cites·10 claims
- 1256US2015072521A1Microstructure manufacturing methodCANON KK·Filed 2014·Application pending·0 cites
- 1355US11505456B2Method for producing hollow structure and hollow structureCANON KK·Filed 2019·Granted Nov 22, 2022·0 cites·12 claims
- 1451US10338034B2Transducer device comprising an insulating film between a through wiring line and a semiconductor substrateCANON KK·Filed 2015·Granted Jul 2, 2019·0 cites·18 claims
- 1546US2009161189A1Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching maskCANON KK·Filed 2008·Application pending·0 cites
- 1642US10090780B2Device with electrode connected to through wire, and method for manufacturing the sameCANON KK·Filed 2015·Granted Oct 2, 2018·0 cites·23 claims
- 1740US2018221917A1Capacitive micromachined ultrasonic transducer and method for manufacturing the sameCANON KK·Filed 2018·Application pending·0 cites
- 1838US2014151570A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 1938US2014166894A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 2038US2013118793A1Method for filling through hole of substrate with metal and substrateTESHIMA TAKAYUKI·Filed 2011·Application pending·0 cites
- 2138US2014197325A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 2238US2014151571A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 2337US2014190006A1Method for manufacturing charged particle beam lensSETOMOTO YUTAKA·Filed 2012·Application pending·0 cites
- 2436US2017168025A1Device in which element is provided on substrate having penetrating wire and manufacturing method thereforCANON KK·Filed 2016·Application pending·0 cites
- 2535US2014211920A1Structure and method for manufacturing the sameSETOMOTO YUTAKA·Filed 2012·Application pending·0 cites
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