Assignee
KATO TAKAHISA
JP·3 granted patents·5 pending applications·0 citations·filing 2009–2012
Top patents by PatentIndex Score
8 records- 0142US8324113B2Silicon processing method and silicon substrate with etching maskKATO TAKAHISA·Filed 2009·Granted Dec 4, 2012·0 cites·5 claims
- 0241US8842353B2Microstructure and method of manufacturing the sameKATO TAKAHISA·Filed 2011·Granted Sep 23, 2014·0 cites·13 claims
- 0338US2014151570A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 0438US2014166894A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 0538US2014197325A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 0638US2014151571A1Charged particle beam lens and exposure apparatus using the sameKATO TAKAHISA·Filed 2012·Application pending·0 cites
- 0737US8432661B2Microstructural body and production method thereforKATO TAKAHISA·Filed 2011·Granted Apr 30, 2013·0 cites·7 claims
- 0835US2012024453A1Structure including holder unit and device unit and fixing method for the sameKATO TAKAHISA·Filed 2011·Application pending·0 cites
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