Inventor · disambiguated record
John D. Greene
Also filed as: GREENE JOHN · GREENE JOHN D
12 granted patents·1,143 citations·filing 1988–2011
94Inventor score
Top patents by PatentIndex Score
12 records- 0197US8362425B2Multiple-beam system for high-speed electron-beam inspectionKLA TENCOR CORP·Filed 2011·Granted Jan 29, 2013·68 cites·19 claims
- 0296US8664594B1Electron-optical system for high-speed and high-sensitivity inspectionsJIANG XINRONG·Filed 2011·Granted Mar 4, 2014·120 cites·9 claims
- 0396US7253410B1Charge-control pre-scanning for e-beam imagingKLA TENCOR TECH CORP·Filed 2005·Granted Aug 7, 2007·49 cites·18 claims
- 0496US4877326AMethod and apparatus for optical inspection of substratesKLA INSTR CORP·Filed 1988·Granted Oct 31, 1989·263 cites·56 claims
- 0595US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0688US6833913B1Apparatus and methods for optically inspecting a sample for anomaliesKLA TENCOR TECH CORP·Filed 2002·Granted Dec 21, 2004·44 cites·50 claims
- 0788US5131755AAutomatic high speed optical inspection systemCHADWICK CURT H·Filed 1989·Granted Jul 21, 1992·83 cites·12 claims
- 0883US5085517AAutomatic high speed optical inspection systemCHADWICK CURT H·Filed 1989·Granted Feb 4, 1992·65 cites·56 claims
- 0981US8294125B2High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting apertureHAN LIQUN·Filed 2009·Granted Oct 23, 2012·11 cites·18 claims
- 1075US7012683B2Apparatus and methods for optically inspecting a sample for anomaliesKLA TENCOR TECH CORP·Filed 2004·Granted Mar 14, 2006·13 cites·19 claims
- 1165USRE37740EMethod and apparatus for optical inspection of substratesKLA TENCOR CORP·Filed 1995·Granted Jun 11, 2002·26 cites·56 claims
- 1256US9780004B2Methods and apparatus for optimization of inspection speed by generation of stage speed profile and selection of care areas for automated wafer inspectionGREENE JOHN D·Filed 2011·Granted Oct 3, 2017·1 cites·12 claims
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