Inventor · disambiguated record
Yai-Yei Huang
Also filed as: HUANG YAI-YEI
4 granted patents·1 pending application·140 citations·filing 2003–2006
79Inventor score
Top patents by PatentIndex Score
5 records- 0193US6936544B2Method of removing metal etching residues following a metal etchback process to improve a CMP processTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 30, 2005·105 cites·22 claims
- 0279US7118451B2CMP apparatus and process sequence methodTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 10, 2006·20 cites·20 claims
- 0370US7294043B2CMP apparatus and process sequence methodTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Nov 13, 2007·4 cites·11 claims
- 0466US7004814B2CMP process control methodTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Feb 28, 2006·11 cites·23 claims
- 0533US2006043071A1System and method for process control using in-situ thickness measurementLEE LIANG-LUN·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →