Inventor · disambiguated record
Peter David Engblom
Also filed as: ENGBLOM PETER DAVID
9 granted patents·1 pending application·15 citations·filing 2012–2023
81Inventor score
Top patents by PatentIndex Score
10 records- 0195US10338484B2Recipe selection based on inter-recipe consistencyASML NETHERLANDS BV·Filed 2016·Granted Jul 2, 2019·10 cites·29 claims
- 0282US10001711B2Inspection method, lithographic apparatus, mask and substrateASML NETHERLANDS BV·Filed 2014·Granted Jun 19, 2018·3 cites·23 claims
- 0378US11860548B2Method for characterizing a manufacturing process of semiconductor devicesASML NETHERLANDS BV·Filed 2020·Granted Jan 2, 2024·1 cites·21 claims
- 0476US10394137B2Inspection method, lithographic apparatus, mask and substrateASML NETHERLANDS BV·Filed 2018·Granted Aug 27, 2019·1 cites·24 claims
- 0576US2024111218A1A method for characterizing a manufacturing process of semiconductor devicesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0672US11703772B2Recipe selection based on inter-recipe consistencyASML NETHERLANDS BV·Filed 2020·Granted Jul 18, 2023·0 cites·20 claims
- 0765US12013647B2Metrology methodASML NETHERLANDS BV·Filed 2019·Granted Jun 18, 2024·0 cites·12 claims
- 0865US10901330B2Recipe selection based on inter-recipe consistencyASML NETHERLANDS BV·Filed 2019·Granted Jan 26, 2021·0 cites·20 claims
- 0961US12474647B2Generating an alignment signal based on local alignment mark distortionsASML HOLDING NV·Filed 2021·Granted Nov 18, 2025·0 cites·20 claims
- 1042US9280064B2Lithographic method and apparatusENGBLOM PETER DAVID·Filed 2012·Granted Mar 8, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →