Inventor · disambiguated record
Park-Song Kim
Also filed as: KIM PARK-SONG
2 granted patents·6 citations·filing 2003–2003
51Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0152US6927077B2Method and apparatus for measuring contamination of a semiconductor substrateSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Aug 9, 2005·4 cites·21 claims
- 0247US6869215B2Method and apparatus for detecting contaminants in ion-implanted waferSAMSUNG ELECTRIC·Filed 2003·Granted Mar 22, 2005·2 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →