Inventor · disambiguated record
Palanivel Balasubramaniam
Also filed as: BALASUBRAMANIAM PALANIVEL
4 granted patents·23 citations·filing 2000–2017
68Inventor score
Top patents by PatentIndex Score
4 records- 0163US6200887B1Method to form a smooth gate polysilicon sidewall in the fabrication of integrated circuitsCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Mar 13, 2001·10 cites·23 claims
- 0258US6312999B1Method for forming PLDD structure with minimized lateral dopant diffusionCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Nov 6, 2001·13 cites·20 claims
- 0340US8633081B2Modifying growth rate of a device layerYIN CHUNSHAN·Filed 2010·Granted Jan 21, 2014·0 cites·21 claims
- 0439US10325824B2Methods, apparatus and system for threshold voltage control in FinFET devicesGLOBALFOUNDRIES INC·Filed 2017·Granted Jun 18, 2019·0 cites·10 claims
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