Inventor · disambiguated record
Chia-I Shen
Also filed as: SHEN CHIA-I
7 granted patents·3 pending applications·77 citations·filing 2000–2025
80Inventor score
Top patents by PatentIndex Score
10 records- 0187US2025329517A1Wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0284US6463782B1Self-centering calibration tool and method of calibratingTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Oct 15, 2002·70 cites·18 claims
- 0383US10008367B2Gas diffuser unit, process chamber and wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 26, 2018·4 cites·12 claims
- 0479US10669625B2Pumping liner for chemical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jun 2, 2020·2 cites·20 claims
- 0571US12394602B2Wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
- 0661US10741366B2Process chamber and wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 11, 2020·0 cites·20 claims
- 0760US9048268B2Method and equipment for removing photoresist residue after dry etchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 2, 2015·1 cites·18 claims
- 0842US2015111394A1Mechanisms for forming uniform film on semiconductor substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Application pending·0 cites
- 0939US2015249024A1Method and equipment for removing photoresist residue afer dry etchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Application pending·0 cites
- 1038US8889435B2Plasma density controlWU WEN-SHENG·Filed 2011·Granted Nov 18, 2014·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →