Inventor · disambiguated record
Betty Tang
Also filed as: TANG BETTY · TANG BETTY W
7 granted patents·1 pending application·1,086 citations·filing 1998–2004
91Inventor score
Top patents by PatentIndex Score
8 records- 0198US6340435B1Integrated low K dielectrics and etch stopsAPPLIED MATERIALS INC·Filed 1999·Granted Jan 22, 2002·536 cites·14 claims
- 0297US6858153B2Integrated low K dielectrics and etch stopsAPPLIED MATERIALS INC·Filed 2001·Granted Feb 22, 2005·256 cites·21 claims
- 0393US6669858B2Integrated low k dielectrics and etch stopsAPPLIED MATERIALS INC·Filed 2001·Granted Dec 30, 2003·47 cites·14 claims
- 0493US6211092B1Counterbore dielectric plasma etch process particularly useful for dual damasceneAPPLIED MATERIALS INC·Filed 1998·Granted Apr 3, 2001·132 cites·33 claims
- 0591US6399511B2Plasma etch process in a single inter-level dielectric etchAPPLIED MATERIALS INC·Filed 2000·Granted Jun 4, 2002·49 cites·39 claims
- 0689US7227244B2Integrated low k dielectrics and etch stopsAPPLIED MATERIALS INC·Filed 2004·Granted Jun 5, 2007·27 cites·8 claims
- 0763US7131446B2Light-triggered tattoo processTANG KENNETH Y·Filed 2004·Granted Nov 7, 2006·39 cites·24 claims
- 0839US2002142598A1Plasma dielectric etch process using a long fluorocarbonFiled 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →