Inventor · disambiguated record
William Kuang
Also filed as: KUANG WILLIAM · KUANG WILLIAM W
8 granted patents·1 pending application·36 citations·filing 2005–2018
82Inventor score
Top patents by PatentIndex Score
9 records- 0189US10407771B2Atomic layer deposition chamber with thermal lidAPPLIED MATERIALS INC·Filed 2014·Granted Sep 10, 2019·12 cites·18 claims
- 0288US8618446B2Substrate support with substrate heater and symmetric RF returnCHANG YU·Filed 2011·Granted Dec 31, 2013·12 cites·22 claims
- 0384US8721847B2Homing of arbitrary scan path of a rotating magnetronCHANG YU·Filed 2012·Granted May 13, 2014·4 cites·10 claims
- 0481US8114256B2Control of arbitrary scan path of a rotating magnetronCHANG YU·Filed 2007·Granted Feb 14, 2012·6 cites·17 claims
- 0579US10704142B2Quick disconnect resistance temperature detector assembly for rotating pedestalAPPLIED MATERIALS INC·Filed 2017·Granted Jul 7, 2020·2 cites·20 claims
- 0659US7910853B2Direct real-time monitoring and feedback control of RF plasma output for wafer processingAPPLIED MATERIALS INC·Filed 2008·Granted Mar 22, 2011·0 cites·12 claims
- 0754US9202674B2Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elementsCUVALCI OLKAN·Filed 2008·Granted Dec 1, 2015·0 cites·9 claims
- 0841US2006130971A1Apparatus for generating plasma by RF powerAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 0940US11495932B2Slip ring for use in rotatable substrate supportAPPLIED MATERIALS INC·Filed 2018·Granted Nov 8, 2022·0 cites·20 claims
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