Inventor · disambiguated record
Lakshman Srinivasan
Also filed as: SRINIVASAN LAKSHMAN
4 granted patents·254 citations·filing 1996–2006
81Inventor score
Top patents by PatentIndex Score
4 records- 0193US5808735AMethod for characterizing defects on semiconductor wafersULTRAPOINTE CORP·Filed 1996·Granted Sep 15, 1998·146 cites·14 claims
- 0289US7065239B2Automated repetitive array microstructure defect inspectionAPPLIED MATERIALS INC·Filed 2001·Granted Jun 20, 2006·69 cites·26 claims
- 0381US7761182B2Automatic defect repair systemPHOTON DYNAMICS INC·Filed 2006·Granted Jul 20, 2010·23 cites·52 claims
- 0449US5798830AMethod of establishing thresholds for image comparisonULTRAPOINTE CORP·Filed 1996·Granted Aug 25, 1998·16 cites·20 claims
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