Inventor · disambiguated record
Patrick Scheible
Also filed as: SCHEIBLE LEGAL REPRESENTATIVE · SCHEIBLE PATRICK · WEISSENRIEDER KARL-STEFAN
5 granted patents·2 pending applications·365 citations·filing 2002–2008
83Inventor score
Top patents by PatentIndex Score
7 records- 0193US7489441B2Monocrystalline optical component with curved surface and multilayer coatingZEISS CARL SMT AG·Filed 2005·Granted Feb 10, 2009·277 cites·9 claims
- 0293US7460206B2Projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2004·Granted Dec 2, 2008·71 cites·3 claims
- 0373US8605257B2Projection system with compensation of intensity variations and compensation element thereforPAZIDIS ALEXANDRA·Filed 2005·Granted Dec 10, 2013·7 cites·45 claims
- 0464US6863398B2Method and coating system for coating substrates for optical componentsZEISS CARL SMT AG·Filed 2002·Granted Mar 8, 2005·8 cites·40 claims
- 0560US7093937B2Optical component and coating system for coating substrates for optical componentsZEISS CARL SMT AG·Filed 2005·Granted Aug 22, 2006·2 cites·5 claims
- 0654US2008297745A1Projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 0754US2008291419A1Projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
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