Inventor · disambiguated record
Gary Lind
Also filed as: LIND GARY · LIND GARY B · LIND GARY BRIDGER
22 granted patents·16 pending applications·1,626 citations·filing 2001–2025
95Inventor score
Top patents by PatentIndex Score
38 records- 0198US9951421B2Inlet for effective mixing and purgingLAM RES CORP·Filed 2014·Granted Apr 24, 2018·419 cites·19 claims
- 0298US6883733B1Tapered post, showerhead design to improve mixing on dual plenum showerheadsNOVELLUS SYSTEMS INC·Filed 2002·Granted Apr 26, 2005·480 cites·20 claims
- 0397US7737035B1Dual seal deposition process chamber and processNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 15, 2010·472 cites·33 claims
- 0497US6551487B1Methods and apparatus for controlled-angle wafer immersionNOVELLUS SYSTEMS INC·Filed 2001·Granted Apr 22, 2003·145 cites·16 claims
- 0595US7686927B1Methods and apparatus for controlled-angle wafer positioningNOVELLUS SYSTEMS INC·Filed 2006·Granted Mar 30, 2010·26 cites·7 claims
- 0693US9468958B2Airborne component extractor with adjustable flow ratesILLINOIS TOOL WORKS·Filed 2013·Granted Oct 18, 2016·8 cites·20 claims
- 0792US10460977B2Lift pin holder with spring retention for substrate processing systemsLAM RES CORP·Filed 2016·Granted Oct 29, 2019·10 cites·19 claims
- 0886US9068347B2Curtain wall panel bracket leveling systemILLINOIS TOOL WORKS·Filed 2013·Granted Jun 30, 2015·14 cites·13 claims
- 0986US7097410B1Methods and apparatus for controlled-angle wafer positioningNOVELLUS SYSTEMS INC·Filed 2003·Granted Aug 29, 2006·28 cites·10 claims
- 1084US9088085B2High temperature electrode connectionsNOVELLUS SYSTEMS INC·Filed 2012·Granted Jul 21, 2015·6 cites·23 claims
- 1184US8753447B2Heat shield for heater in semiconductor processing apparatusLIND GARY·Filed 2009·Granted Jun 17, 2014·11 cites·4 claims
- 1277US2025137125A1Vapor accumulator for corrosive gases with purgingLAM RES CORP·Filed 2024·Application pending·0 cites
- 1374US9677265B2Curtain wall panel bracket leveling systemILLINOIS TOOL WORKS·Filed 2016·Granted Jun 13, 2017·3 cites·20 claims
- 1470US10895539B2In-situ chamber clean end point detection systems and methods using computer vision systemsLAM RES CORP·Filed 2018·Granted Jan 19, 2021·1 cites·15 claims
- 1565US2025041990A1Pedestal polishing apparatusLAM RES CORP·Filed 2024·Application pending·0 cites
- 1660US12227842B2Vapor accumulator for corrosive gases with purgingLAM RES CORP·Filed 2020·Granted Feb 18, 2025·0 cites·22 claims
- 1760US12215420B2Pedestal thermal profile tuning using multiple heated zones and thermal voidsLAM RES CORP·Filed 2021·Granted Feb 4, 2025·0 cites·21 claims
- 1859USD1057675SPedestal for a substrate processing systemLAM RES CORP·Filed 2021·Granted Jan 14, 2025·3 cites·1 claims
- 1959US2025179633A1Pedestal thermal profile tuning using multiple heated zones and thermal voidLAM RES CORP·Filed 2025·Application pending·0 cites
- 2058US10603698B2Airborne component extractor hoodILLINOIS TOOL WORKS·Filed 2013·Granted Mar 31, 2020·0 cites·20 claims
- 2158US9964332B2Systems and methods for bulk vaporization of precursorLAM RES CORP·Filed 2014·Granted May 8, 2018·0 cites·33 claims
- 2256US2024295026A1Hybrid showerhead with separate faceplate for high temperature processLAM RES CORP·Filed 2021·Application pending·0 cites
- 2356US2025019830A1Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2023·Application pending·0 cites
- 2455US2023383406A1Axially cooled metal showerheads for high temperature processesLAM RES CORP·Filed 2021·Application pending·0 cites
- 2553US2015030766A1Pedestal bottom clean for improved fluorine utilization and integrated symmetric forelineNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
- 2651US12162117B2Pedestal polishing apparatusLAM RES CORP·Filed 2020·Granted Dec 10, 2024·0 cites·24 claims
- 2749US2023126459A1Ring structure with compliant centering fingersLAM RES CORP·Filed 2021·Application pending·0 cites
- 2847US9410315B2Curtain wall panel bracket leveling systemILLINOIS TOOL WORKS·Filed 2015·Granted Aug 9, 2016·0 cites·24 claims
- 2946US2024175134A1Conductive cooling of a low temperature pedestal operating in a high temperature deposition sequenceLAM RES CORP·Filed 2022·Application pending·0 cites
- 3045US2014209589A1Guided component extraction system and methodILLINOIS TOOL WORKS LNC·Filed 2013·Application pending·0 cites
- 3144US10132413B2Gas inlet valve with incompatible materials isolationLAM RES CORP·Filed 2016·Granted Nov 20, 2018·0 cites·21 claims
- 3244US2024203703A1Shadow ring alignment for substrate supportLAM RES CORP·Filed 2022·Application pending·0 cites
- 3342US2013067860A1Form fill compression seal and cut-off packaging system for compressible goodsMCDONALD DANIEL·Filed 2012·Application pending·0 cites
- 3442US2008081114A1Apparatus and method for delivering uniform fluid flow in a chemical deposition systemNOVELLUS SYSTEMS INC·Filed 2006·Application pending·0 cites
- 3540US2013000848A1Pedestal with edge gas deflector for edge profile controlNOVELLUS SYSTEMS INC·Filed 2012·Application pending·0 cites
- 3639US11725285B2Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2019·Granted Aug 15, 2023·0 cites·10 claims
- 3736US2017342562A1Vapor manifold with integrated vapor concentration sensorLAM RES CORP·Filed 2016·Application pending·0 cites
- 3835US2016343595A1Corrosion resistant gas distribution manifold with thermally controlled faceplateLAM RES CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →