Inventor · disambiguated record
Hideo Funakoshi
Also filed as: FUNAKOSHI HIDEO
6 granted patents·1 pending application·13 citations·filing 2008–2018
76Inventor score
Top patents by PatentIndex Score
7 records- 0174US7819594B2Development processing deviceTOKYO ELECTRON LTD·Filed 2008·Granted Oct 26, 2010·4 cites·20 claims
- 0270US10807027B2Treatment solution supply apparatus and substrate treatment systemTOKYO ELECTRON LTD·Filed 2018·Granted Oct 20, 2020·1 cites·10 claims
- 0369US7714979B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted May 11, 2010·3 cites·9 claims
- 0467US9649577B2Bubble removing method, bubble removing apparatus, degassing apparatus, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2014·Granted May 16, 2017·2 cites·12 claims
- 0561US7600933B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Oct 13, 2009·1 cites·7 claims
- 0660US8707893B2Substrate treatment system, substrate treatment method, and non-transitory computer storage mediumDEGUCHI MASATOSHI·Filed 2011·Granted Apr 29, 2014·2 cites·18 claims
- 0744US2015165458A1Liquid supplying apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →