Inventor · disambiguated record
Takari Yamamoto
Also filed as: YAMAMOTO TAKARI
7 granted patents·6 pending applications·6 citations·filing 2014–2024
74Inventor score
Files withTOKYO ELECTRON LTD13
Top patents by PatentIndex Score
13 records- 0180US12474686B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Nov 18, 2025·0 cites·19 claims
- 0278US10921773B2Temperature control methodTOKYO ELECTRON LTD·Filed 2016·Granted Feb 16, 2021·2 cites·7 claims
- 0374US9885612B2Optical temperature sensor and method of controlling sameTOKYO ELECTRON LTD·Filed 2015·Granted Feb 6, 2018·2 cites·10 claims
- 0473US10139290B2Optical temperature sensor and method for manufacturing optical temperature sensorTOKYO ELECTRON LTD·Filed 2015·Granted Nov 27, 2018·2 cites·7 claims
- 0563US2021132575A1Temperature control methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0662US12142501B2Substrate processing system and temperature control methodTOKYO ELECTRON LTD·Filed 2021·Granted Nov 12, 2024·0 cites·9 claims
- 0761US2025087470A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0860US2025013213A1Analysis apparatus, substrate processing system, substrate processing apparatus, analysis method, and analysis programTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0958US2024234113A1Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1049US11019285B2Calibration method of infrared camera and calibration system of infrared cameraTOKYO ELECTRON LTD·Filed 2019·Granted May 25, 2021·0 cites·10 claims
- 1148US2017372928A1Substrate processing system and temperature control methodTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1239US10139289B2Temperature measurement device, light emitting module and temperature measurement methodTOKYO ELECTRON LTD·Filed 2015·Granted Nov 27, 2018·0 cites·6 claims
- 1339US2017138800A1Temperature sensorTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →