Inventor · disambiguated record
Wolfgang Benecke
Also filed as: BENECKE WOLFGANG
15 granted patents·1 pending application·950 citations·filing 1988–2005
95Inventor score
Top patents by PatentIndex Score
16 records- 0198US6149789AProcess for manipulating microscopic, dielectric particles and a device thereforFRAUNHOFER GES FORSCHUNG·Filed 1995·Granted Nov 21, 2000·292 cites·20 claims
- 0298US5454472AMethod of continuously separating mixtures of microscopic dielectric particles and apparatus for carrying through this methodFRAUNHOFER GES FORSCHUNG·Filed 1992·Granted Oct 3, 1995·272 cites·23 claims
- 0395US4994336AMethod for manufacturing a control plate for a lithographic deviceSIEMENS AG·Filed 1989·Granted Feb 19, 1991·84 cites·6 claims
- 0482US5407856ADirect substrate bondingFRAUNHOFER GES FORSCHUNG·Filed 1992·Granted Apr 18, 1995·75 cites·19 claims
- 0582US5182910AMicromechanical manipulatorFRAUNHOFER GES FORSCHUNG·Filed 1991·Granted Feb 2, 1993·37 cites·19 claims
- 0681US6619142B1Integrated fluid sensing deviceFESTO AG & CO·Filed 2000·Granted Sep 16, 2003·30 cites·52 claims
- 0776US5335544AApparatus for measuring mechanical forces and force actionsFRAUNHOFER GES FORSCHUNG·Filed 1990·Granted Aug 9, 1994·39 cites·8 claims
- 0876US5065628AInstrument for measuring accelerations and process of making the sameFRAUNHOFER GES FORSCHUNG·Filed 1988·Granted Nov 19, 1991·29 cites·12 claims
- 0975US5049460AMethod for producing beam-shaping diaphragms for lithographic devicesSIEMENS AG·Filed 1989·Granted Sep 17, 1991·20 cites·6 claims
- 1066US6971272B2Integrated fluid sensing deviceFESTO AG & CO·Filed 2005·Granted Dec 6, 2005·7 cites·26 claims
- 1154US5172950AMicromanipulator for gripping objectsFRAUNHOFER GES FORSCHUNG·Filed 1989·Granted Dec 22, 1992·21 cites·26 claims
- 1252US5338997AMicromanipulator for moving objectsFRAUNHOFER GES FORSCHUNG·Filed 1993·Granted Aug 16, 1994·22 cites·9 claims
- 1349US5572076ADielectric micromechanical elementFRAUNHOFER GES FORSCHUNG·Filed 1990·Granted Nov 5, 1996·14 cites·14 claims
- 1436US5726509ADielectric motorFRAUNHOFER GES FORSCHUNG·Filed 1990·Granted Mar 10, 1998·7 cites·17 claims
- 1536US2004025598A1Integrated fluid sensing deviceFESTO AG & CO·Filed 2003·Application pending·0 cites
- 1628US5430339AElectric motorFRAUNHOFER GES FORSCHUNG·Filed 1992·Granted Jul 4, 1995·1 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →