Inventor · disambiguated record
Sohan S. Mehta
Also filed as: MEHTA SOHAN · MEHTA SOHAN S · MEHTA SOHAN SINGH
6 granted patents·3 pending applications·11 citations·filing 2009–2017
74Inventor score
Top patents by PatentIndex Score
9 records- 0180US9691654B1Methods and devices for back end of line via formationGLOBALFOUNDRIES INC·Filed 2015·Granted Jun 27, 2017·3 cites·11 claims
- 0275US8932961B2Critical dimension and pattern recognition structures for devices manufactured using double patterning techniquesMEHTA SOHAN·Filed 2012·Granted Jan 13, 2015·5 cites·4 claims
- 0366US10504774B2Lithographic patterning to form fine pitch featuresGLOBALFOUNDRIES INC·Filed 2016·Granted Dec 10, 2019·1 cites·20 claims
- 0461US9171735B2Method for fabricating a semiconductor integrated circuit with a litho-etch, litho-etch process for etching trenchesGLOBALFOUNDRIES INC·Filed 2013·Granted Oct 27, 2015·1 cites·17 claims
- 0558US8350235B2Semiconductor intra-field dose correctionFREESCALE SEMICONDUCTOR INC·Filed 2009·Granted Jan 8, 2013·1 cites·15 claims
- 0652US2015050811A1Critical dimension and pattern recognition structures for devices manufactured using double patterning techniquesGLOBALFOUNDRIES INC·Filed 2014·Application pending·0 cites
- 0745US2018299765A1Extreme ultraviolet lithography (euvl) reflective maskGLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
- 0840US10353288B2Litho-litho-etch double patterning methodGLOBALFOUNDRIES INC·Filed 2017·Granted Jul 16, 2019·0 cites·17 claims
- 0935US2019079408A1Dual developing methods for lithography patterningGLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
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