Inventor · disambiguated record
Shigemitsu Sato
Also filed as: SATO SHIGEMITSU
1 granted patent·4 pending applications·10 citations·filing 2004–2012
32Inventor score
Files withULVAC INC5
Top patents by PatentIndex Score
5 records- 0164US7347919B2Sputter source, sputtering device, and sputtering methodULVAC INC·Filed 2004·Granted Mar 25, 2008·10 cites·11 claims
- 0245US2011180402A1Vacuum Processing ApparatusULVAC INC·Filed 2009·Application pending·0 cites
- 0334US2013068614A1Sputter deposition apparatusULVAC INC·Filed 2012·Application pending·0 cites
- 0434US2013098757A1Sputtering deposition apparatus and adhesion preventing memberULVAC INC·Filed 2012·Application pending·0 cites
- 0534US2013092533A1Sputter deposition apparatusULVAC INC·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →