Inventor · disambiguated record
Chuangxin Zhao
Also filed as: ZHAO CHUANGXIN
2 granted patents·11 citations·filing 2014–2015
50Inventor score
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0190US10222701B2Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 5, 2019·11 cites·21 claims
- 0242US10042260B2Device for monitoring a radiation source, radiation source, method of monitoring a radiation source, device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Aug 7, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →