Inventor · disambiguated record
Vuong P. Nguyen
Also filed as: NGUYEN VUONG P
5 granted patents·1 pending application·684 citations·filing 1993–2003
85Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0197US6884066B2Thermal process station with heated lidFSI INT INC·Filed 2003·Granted Apr 26, 2005·553 cites·21 claims
- 0284US6307184B1Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 1999·Granted Oct 23, 2001·71 cites·29 claims
- 0381US6423947B2Thermal processing chamber for heating and cooling wafer-like objectsFSI INT INC·Filed 2001·Granted Jul 23, 2002·27 cites·6 claims
- 0466US6838115B2Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devicesFSI INT INC·Filed 2001·Granted Jan 4, 2005·10 cites·39 claims
- 0551US5427820AThermal control line for delivering liquid to a point of use in a photolithography systemSEMICONDUCTOR SYSTEMS INC·Filed 1993·Granted Jun 27, 1995·23 cites·14 claims
- 0639US2004047993A1Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devicesFiled 2003·Application pending·0 cites
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