Inventor · disambiguated record
Hirohito Itoh
Also filed as: ITOH HIROHITO
5 granted patents·332 citations·filing 1988–2000
86Inventor score
Top patents by PatentIndex Score
5 records- 0196US5684856AStage device and pattern transfer system using the sameCANON KK·Filed 1994·Granted Nov 4, 1997·133 cites·16 claims
- 0290US5260580AStage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage deviceCANON KK·Filed 1992·Granted Nov 9, 1993·115 cites·15 claims
- 0379US6504160B2Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage deviceCANON KK·Filed 2000·Granted Jan 7, 2003·20 cites·61 claims
- 0471US4854169AAccelerometerJAPAN AVIATION ELECTRON·Filed 1988·Granted Aug 8, 1989·37 cites·9 claims
- 0562US6072183AStage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage deviceCANON KK·Filed 1994·Granted Jun 6, 2000·27 cites·70 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →