Inventor · disambiguated record
Katsuhiro Kawasaki
Also filed as: KAWASAKI KATSUHIRO
8 granted patents·177 citations·filing 1982–2005
88Inventor score
Top patents by PatentIndex Score
8 records- 0185US7744447B2Abrasive discGOEI CO LTD·Filed 2005·Granted Jun 29, 2010·30 cites·19 claims
- 0285US5209813ALithographic apparatus and methodHITACHI LTD·Filed 1991·Granted May 11, 1993·53 cites·55 claims
- 0378US4524277ACharged particle beam apparatusHITACHI LTD·Filed 1982·Granted Jun 18, 1985·23 cites·13 claims
- 0470US6225011B1Method for manufacturing semiconductor devices utilizing plurality of exposure systemsHITACHI LTD·Filed 1999·Granted May 1, 2001·38 cites·10 claims
- 0562US4710640AElectron beam lithographyHITACHI LTD·Filed 1985·Granted Dec 1, 1987·12 cites·4 claims
- 0650US5759423AElectron beam writing method and apparatus for carrying out the sameHITACHI LTD·Filed 1995·Granted Jun 2, 1998·9 cites·48 claims
- 0737US5326979AElectron beam lithography systemHITACHI LTD·Filed 1992·Granted Jul 5, 1994·4 cites·12 claims
- 0836US4707950ARing grinding toolTOHO YOGYO KABUSHIKI KAISHA·Filed 1986·Granted Nov 24, 1987·8 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →