Inventor · disambiguated record
Noritaka Uchida
Also filed as: UCHIDA NORITAKA
9 granted patents·42 citations·filing 2004–2018
83Inventor score
Top patents by PatentIndex Score
9 records- 0193US7806989B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Oct 5, 2010·24 cites·28 claims
- 0284US8337659B2Substrate processing method and substrate processing apparatusORII TAKEHIKO·Filed 2005·Granted Dec 25, 2012·10 cites·13 claims
- 0377US8794250B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Aug 5, 2014·3 cites·7 claims
- 0472US7914626B2Liquid processing method and liquid processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Mar 29, 2011·4 cites·17 claims
- 0546US7731799B2Substrate processing method, substrate processing apparatus and computer-readable memory mediumTOKYO ELECTRON LTD·Filed 2004·Granted Jun 8, 2010·1 cites·23 claims
- 0645US8137478B2Substrate processing method and substrate processing apparatusSEKIGUCHI KENJI·Filed 2010·Granted Mar 20, 2012·0 cites·14 claims
- 0742US9095953B2Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrateNAKAMORI MITSUNORI·Filed 2011·Granted Aug 4, 2015·0 cites·9 claims
- 0842US7693597B2Computer readable storage medium for controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Apr 6, 2010·0 cites·11 claims
- 0933US11084072B2Substrate processing apparatus, substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Aug 10, 2021·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →