Inventor · disambiguated record

Shamouil Shamoulian

Also filed as: SHAMOULIAN SHAMOUIL

1 granted patent·21 citations·filing 2001–2001

41Inventor score

Technology areasY10T

Files withAPPLIED MATERIALS INC1

Top patents by PatentIndex Score

1 record

0176US6572814B2Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gasAPPLIED MATERIALS INC·Filed 2001·Granted Jun 3, 2003·21 cites·15 claims

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