Inventor · disambiguated record
Yu-Chung Tien
Also filed as: TIEN YU-CHUNG
5 granted patents·1 pending application·67 citations·filing 1996–2003
79Inventor score
Top patents by PatentIndex Score
6 records- 0171US5997589AAdjustment pumping plate design for the chamber of semiconductor equipmentWINBOND ELECTRONICS CORP·Filed 1998·Granted Dec 7, 1999·48 cites·16 claims
- 0241US6403496B2Method for forming shallow trench isolationsWINDBOND ELECTRONICS CORP·Filed 2001·Granted Jun 11, 2002·1 cites·3 claims
- 0341US2004103844A1[gas distributing system for delivering plasma gas to a wafer reaction chamber]Filed 2003·Application pending·0 cites
- 0434US6221785B1Method for forming shallow trench isolationsWINBOND ELECTRONICS CORP·Filed 1998·Granted Apr 24, 2001·6 cites·7 claims
- 0528US5672241AMethod of forming metal contact holes in semiconductor fabricationWINBOND ELECTRONICS CORP·Filed 1996·Granted Sep 30, 1997·7 cites·8 claims
- 0626US6329293B1Method for cleaning a polymerWINBOND ELECTRONICS CORP·Filed 1998·Granted Dec 11, 2001·5 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →