Inventor · disambiguated record
Michael Puggl
Also filed as: PUGGL MICHAEL
6 granted patents·6 pending applications·24 citations·filing 2008–2023
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
12 records- 0186US10658204B2Spin chuck with concentrated center and radial heatingLAM RES AG·Filed 2017·Granted May 19, 2020·7 cites·18 claims
- 0281US8596623B2Device and process for liquid treatment of a wafer shaped articleFRANK DIETER·Filed 2009·Granted Dec 3, 2013·8 cites·13 claims
- 0370US8821681B2Apparatus and method for wet treatment of disc-like articlesPUGGL MICHAEL·Filed 2008·Granted Sep 2, 2014·6 cites·14 claims
- 0462US9130002B2Device for holding wafer shaped articlesFRANK DIETER·Filed 2010·Granted Sep 8, 2015·1 cites·19 claims
- 0562US8997764B2Method and apparatus for liquid treatment of wafer shaped articlesPUGGL MICHAEL·Filed 2011·Granted Apr 7, 2015·2 cites·15 claims
- 0654US2025364304A1System for processing wafer-shaped articlesLAM RES AG·Filed 2023·Application pending·0 cites
- 0745US2023360952A1Apparatus for processing a waferLAM RES AG·Filed 2021·Application pending·0 cites
- 0836US2014041803A1Method and apparatus for liquid treatment of wafer shaped articlesKOSHIZAWA TAKEHITO·Filed 2012·Application pending·0 cites
- 0932US2014026926A1Method and apparatus for liquid treatment of wafer-shaped articlesSEMMELROCK CHRISTOPH·Filed 2012·Application pending·0 cites
- 1031US2012286481A1Device and process for liquid treatment of wafer shaped articlesPUGGL MICHAEL·Filed 2011·Application pending·0 cites
- 1129US2016376702A1Dual mode chamber for processing wafer-shaped articlesLAM RES AG·Filed 2015·Application pending·0 cites
- 1227US8945341B2Method and device for wet treatment of plate-like articlesMATSUSHITA MASAICHIRO KEN·Filed 2011·Granted Feb 3, 2015·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →