Inventor · disambiguated record
Min Oh
Also filed as: OH MIN S · OH MIN SUB
1 granted patent·2 pending applications·139 citations·filing 2001–2023
55Inventor score
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3 records- 0193US7138336B2Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereofASM GENITECH KOREA LTD·Filed 2001·Granted Nov 21, 2006·139 cites·46 claims
- 0250US2023156994A1Apparatus for repairing elementCT ADVANCED META MAT·Filed 2023·Application pending·0 cites
- 0345US2006276037A1Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereofLEE CHUN S·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →