Inventor · disambiguated record
Stephen Topping
Also filed as: TOPPING STEPHEN · TOPPING STEPHEN GIBSON
5 granted patents·10 pending applications·17 citations·filing 2010–2024
74Inventor score
Top patents by PatentIndex Score
15 records- 0195US11835868B2Protective coating for electrostatic chucksLAM RES CORP·Filed 2021·Granted Dec 5, 2023·3 cites·7 claims
- 0294US12217985B2Wafer placement correction in indexed multi-station processing chambersLAM RES CORP·Filed 2020·Granted Feb 4, 2025·4 cites·21 claims
- 0393US11086233B2Protective coating for electrostatic chucksLAM RES CORP·Filed 2018·Granted Aug 10, 2021·10 cites·21 claims
- 0474US2025125169A1Wafer placement correction in indexed multi-station processing chambersLAM RES CORP·Filed 2024·Application pending·0 cites
- 0574US2024045344A1Protective coating for electrostatic chucksLAM RES CORP·Filed 2023·Application pending·0 cites
- 0668US8829444B2Synthesis of advanced scintillators via vapor deposition techniquesUNIV BOSTON·Filed 2013·Granted Sep 9, 2014·0 cites·21 claims
- 0753US2025246406A1Feedback control systems for impedance matchingLAM RES CORP·Filed 2022·Application pending·0 cites
- 0851US2025054734A1Showerhead faceplate configurationsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0951US2025038034A1Method and apparatus for radio frequency grid design in an esc to reduce film asymmetryLAM RES CORP·Filed 2023·Application pending·0 cites
- 1048US2023044064A1Showerhead with faceplate having internal contoursLAM RES CORP·Filed 2020·Application pending·0 cites
- 1147US2024213070A1Rotational indexers with wafer centering capabilityLAM RES CORP·Filed 2022·Application pending·0 cites
- 1245US2022375719A1Frequency based impedance adjustment in tuning circuitsLAM RES CORP·Filed 2020·Application pending·0 cites
- 1344US8530845B2Synthesis of advanced scintillators via vapor deposition techniquesSARIN VINOD K·Filed 2010·Granted Sep 10, 2013·0 cites·8 claims
- 1444US2024128062A1Monolithic anisotropic substrate supportsLAM RES CORP·Filed 2020·Application pending·0 cites
- 1544US2024401202A1Balancing gas flow to multiple stations using heaters upstream of flow restrictorsLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →