Inventor · disambiguated record
Ambarish Chhatre
Also filed as: CHHATRE AMBARISH · CHHATRE AMBARISH (RISH)
6 granted patents·7 pending applications·19 citations·filing 2011–2023
77Inventor score
Top patents by PatentIndex Score
13 records- 0184US10804081B2Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamberLAM RES CORP·Filed 2013·Granted Oct 13, 2020·7 cites·30 claims
- 0284US9869392B2Edge seal for lower electrode assemblySCHAEFER DAVID·Filed 2012·Granted Jan 16, 2018·6 cites·13 claims
- 0379US12368025B2Edge seal for lower electrode assemblyLAM RES CORP·Filed 2023·Granted Jul 22, 2025·0 cites·20 claims
- 0479US9859142B2Edge seal for lower electrode assemblySCHAEFER DAVID·Filed 2011·Granted Jan 2, 2018·5 cites·17 claims
- 0571US11781650B2Edge seal for lower electrode assemblyLAM RES CORP·Filed 2017·Granted Oct 10, 2023·1 cites·13 claims
- 0654US2025349511A1Window Edge Heater for High Power Plasma Processing ApplicationsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0747US2023178342A1Mid-chamber flow optimizerLAM RES CORP·Filed 2021·Application pending·0 cites
- 0846US9054148B2Method for performing hot water seal on electrostatic chuckSHIH HONG·Filed 2011·Granted Jun 9, 2015·0 cites·12 claims
- 0946US2023395359A1Cold edge low temperature electrostatic chuckLAM RES CORP·Filed 2021·Application pending·0 cites
- 1045US2023298929A1Thin shadow ring for low-tilt trench etchingLAM RES CORP·Filed 2021·Application pending·0 cites
- 1141US2015235889A1System and method for performing hot water seal on electrostatic chuckLAM RES CORP·Filed 2015·Application pending·0 cites
- 1241US2020234920A1Coil and window for plasma processing systemLAM RES CORP·Filed 2019·Application pending·0 cites
- 1338US2021225616A1Components and Processes for Managing Plasma Process Byproduct MaterialsLAM RES CORP·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →