Inventor · disambiguated record
Shigeto Izumi
Also filed as: IZUMI SHIGETO
11 granted patents·1 pending application·305 citations·filing 1997–2014
91Inventor score
Top patents by PatentIndex Score
12 records- 0184US6012964ACarrier and CMP apparatusSPEEDFAM CO LTD·Filed 1998·Granted Jan 11, 2000·73 cites·56 claims
- 0283US5916009AApparatus for applying an urging force to a waferSPEEDFAM CO LTD·Filed 1997·Granted Jun 29, 1999·70 cites·17 claims
- 0381US8206525B2Wafer bonding apparatusIZUMI SHIGETO·Filed 2007·Granted Jun 26, 2012·8 cites·13 claims
- 0479US7175504B2Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatusNIKON CORP·Filed 2005·Granted Feb 13, 2007·7 cites·6 claims
- 0579US6273803B1Carriers and polishing apparatusSPEEDFAM CO LTD·Filed 1999·Granted Aug 14, 2001·57 cites·14 claims
- 0677US9498944B2Pressuring module, pressuring apparatus, substrate bonding apparatus, substrate bonding method, and bonded substrateNIKON CORP·Filed 2014·Granted Nov 22, 2016·3 cites·19 claims
- 0774US6030488AChemical and mechanical polishing apparatusSPEEDFAM CO LTD·Filed 1998·Granted Feb 29, 2000·38 cites·12 claims
- 0872US6062954ASemiconductor wafer surface flattening apparatusSPEEDFAM CO LTD·Filed 1998·Granted May 16, 2000·44 cites·17 claims
- 0968US7175508B2Polishing apparatus, method of manufacturing semiconductor device using the same, and semiconductor device manufactured by this methodNIKON CORP·Filed 2005·Granted Feb 13, 2007·3 cites·13 claims
- 1065US9978616B2Pressing apparatus, substrate bonding apparatus and stacked substrateNIKON CORP·Filed 2014·Granted May 22, 2018·1 cites·29 claims
- 1162US8794287B2Wafer bonding apparatusIZUMI SHIGETO·Filed 2012·Granted Aug 5, 2014·1 cites·12 claims
- 1249US2012251789A1Pressuring module, pressuring apparatus, substrate bonding apparatus, substrate bonding method, and bonded substrateTANAKA KEIICHI·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Shigeto Izumi files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →